Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D850909 | Packaging container | Mitsuko Ogaki, Hiroo Fujiwara, Hiroo Noguchi | 2019-06-11 |
| 9534724 | Gas showerhead, method for making the same and thin film growth reactor | Yong Jiang, Ning Zhou, Zhiyou Du | 2017-01-03 |
| D729069 | Packaging box | Mutsumi Ajichi | 2015-05-12 |
| D725479 | Packaging container | Mutsumi Ajichi | 2015-03-31 |
| 8336488 | Multi-station plasma reactor with multiple plasma regions | Aihua Chen, Yijun Liu, Jinyuan Chen, Lee Luo, Tuqiang Ni +1 more | 2012-12-25 |
| 7658800 | Gas distribution assembly for use in a semiconductor work piece processing reactor | Aihua Chen, Shulin Wang, Gerald Yin, Qing Lv, Li Fu | 2010-02-09 |
| D605542 | Bell push device | — | 2009-12-08 |
| D600566 | Sheet packaging | Mutsumi Ajichi | 2009-09-22 |
| 7520939 | Integrated bevel clean chamber | Lily Pang, Anh N. Nguyen, Alexander Lerner | 2009-04-21 |
| 7223323 | Multi-chemistry plating system | Michael Yang, Ming Xi, Russell C. Ellwanger, Eric Bramwell Britcher, Bernardo Donoso +11 more | 2007-05-29 |
| 6802906 | Emissivity-change-free pumping plate kit in a single wafer chamber | Xiaoliang Jin, Shulin Wang, Lee Luo, Steven Chen | 2004-10-12 |
| 6652655 | Method to isolate multi zone heater from atmosphere | — | 2003-11-25 |
| 6645884 | Method of forming a silicon nitride layer on a substrate | Michael Yang, Chien-Teh Kao, Karl A. Littau, Steven Chen, Ying Yu | 2003-11-11 |
| 6646235 | Multi-zone resistive heater | Steven Chen, Michael Yang, Bruce W. Peuse, Karl A. Littau, Yu-Chia Chang | 2003-11-11 |
| 6617553 | Multi-zone resistive heater | Anqing Cui, Xiaoxiong Yuan | 2003-09-09 |
| 6586343 | Method and apparatus for directing constituents through a processing chamber | Ying Yu, Steven Chen | 2003-07-01 |
| 6582522 | Emissivity-change-free pumping plate kit in a single wafer chamber | Lee Luo, Shulin Wang, Binh Tran, Alexander Tam, Errol Antonio C. Sanchez +2 more | 2003-06-24 |
| 6530992 | Method of forming a film in a chamber and positioning a substitute in a chamber | Michael Yang, Steven Chen | 2003-03-11 |
| 6500266 | Heater temperature uniformity qualification tool | Alexander M. Rubinchik, Aihua Chen, Abril Cabreros, Steven T. Li, Mark Yam +1 more | 2002-12-31 |
| 6423949 | Multi-zone resistive heater | Steven Chen, Michael Yang, Bruce W. Peuse, Karl A. Littau, Yu-Chia Chang | 2002-07-23 |
| 6156079 | Window support member for a semiconductor processing system | Yu-Feng Chang, Kuo-Chun Wu, Steven Chen | 2000-12-05 |
| 6143084 | Apparatus and method for generating plasma | Steven T. Li, Andrew Ruspini, Yu-Chia Chang, Aihua Chen, Binh Bui | 2000-11-07 |
| 6116186 | Apparatus for cooling a plasma generator | Steven T. Li, Andrew Ruspini | 2000-09-12 |
| 6110284 | Apparatus and a method for shielding light emanating from a light source heating a semicondutor processing chamber | Chen-An Chen, Steven Chen | 2000-08-29 |
| 6066836 | High temperature resistive heater for a process chamber | Steven Chen, Mei Chang, Ming Xi, Chen-An Chen, Chiliang Chen | 2000-05-23 |