Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8147909 | Method of making and using alloy susceptor with improved properties for film deposition | Shuo-Jieh Wu, Hsu Chun Yuan, Tung-Li Lee, Hs Chiu, Yen-Yu Chen +3 more | 2012-04-03 |
| 6500266 | Heater temperature uniformity qualification tool | Henry Ho, Alexander M. Rubinchik, Aihua Chen, Abril Cabreros, Mark Yam +1 more | 2002-12-31 |
| 6276295 | Thermal reflow method employing microwave energy | Ling Chen | 2001-08-21 |
| 6143084 | Apparatus and method for generating plasma | Andrew Ruspini, Henry Ho, Yu-Chia Chang, Aihua Chen, Binh Bui | 2000-11-07 |
| 6116186 | Apparatus for cooling a plasma generator | Andrew Ruspini, Henry Ho | 2000-09-12 |