Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6190113 | Quartz pin lift for single wafer chemical vapor deposition/etch process chamber | Roger N. Anderson | 2001-02-20 |
| 6143084 | Apparatus and method for generating plasma | Steven T. Li, Andrew Ruspini, Henry Ho, Yu-Chia Chang, Aihua Chen | 2000-11-07 |
| 5798983 | Acoustic sensor system for vehicle detection and multi-lane highway monitoring | John Patrick Kuhn, Gregory J Pieper | 1998-08-25 |