Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7101466 | Linear sweeping magnetron sputtering cathode and scanning in-line system for arc-free reactive deposition and high target utilization | Subhadra Gupta | 2006-09-05 |
| 6143084 | Apparatus and method for generating plasma | Steven T. Li, Henry Ho, Yu-Chia Chang, Aihua Chen, Binh Bui | 2000-11-07 |
| 6116186 | Apparatus for cooling a plasma generator | Steven T. Li, Henry Ho | 2000-09-12 |