Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7101466 | Linear sweeping magnetron sputtering cathode and scanning in-line system for arc-free reactive deposition and high target utilization | Andrew Ruspini | 2006-09-05 |
| 6537428 | Stable high rate reactive sputtering | Wei Xiong | 2003-03-25 |
| 5958134 | Process equipment with simultaneous or sequential deposition and etching capabilities | Tugrul Yasar, Ira Reiss, Rajendrapura Seetharamaiya Krishnaswamy, Israel A. Wagner | 1999-09-28 |