Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9206500 | Method and apparatus for surface processing of a substrate using an energetic particle beam | Boris L. Druz, Roger P. Fremgen, Alan V. Hayes, Viktor Kanarov, Robert Krause +1 more | 2015-12-08 |
| 7183716 | Charged particle source and operation thereof | Viktor Kanarov, Alan V. Hayes, Rustam Yevtukhov, Roger P. Fremgen, Adrian Celaru +5 more | 2007-02-27 |
| 6425988 | Method and system using power modulation for maskless vapor deposition of spatially graded thin film and multilayer coatings with atomic-level precision and accuracy | Claude Montcalm, James A. Folta, Swie-In Tan | 2002-07-30 |
| 6258228 | Wafer holder and clamping ring therefor for use in a deposition chamber | — | 2001-07-10 |
| 6183523 | Apparatus for thermal control of variously sized articles in vacuum | Steven Hurwitt | 2001-02-06 |
| 5958134 | Process equipment with simultaneous or sequential deposition and etching capabilities | Tugrul Yasar, Subhadra Gupta, Rajendrapura Seetharamaiya Krishnaswamy, Israel A. Wagner | 1999-09-28 |
| 5879524 | Composite backing plate for a sputtering target | Steven Hurwitt | 1999-03-09 |
| 5795448 | Magnetic device for rotating a substrate | Steven Hurwitt, Marian Zielinski, Swie-In Tan | 1998-08-18 |