Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6844272 | Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers | John S. Taylor, James A. Folta | 2005-01-18 |
| 6668207 | Method and system using power modulation and velocity modulation producing sputtered thin films with sub-angstrom thickness uniformity or custom thickness gradients | James A. Folta, Christopher C. Walton | 2003-12-23 |
| 6634760 | Low-cost method for producing extreme ultraviolet lithography optics | James A. Folta, John S. Taylor, Eberhard A. Spiller | 2003-10-21 |
| 6524449 | Method and system for producing sputtered thin films with sub-angstrom thickness uniformity or custom thickness gradients | James A. Folta, Christopher C. Walton | 2003-02-25 |
| 6425988 | Method and system using power modulation for maskless vapor deposition of spatially graded thin film and multilayer coatings with atomic-level precision and accuracy | James A. Folta, Swie-In Tan, Ira Reiss | 2002-07-30 |
| 6309705 | Process for fabricating high reflectance-low stress Mo--Si multilayer reflective coatings | Paul B. Mirkarimi | 2001-10-30 |
| 6134049 | Method to adjust multilayer film stress induced deformation of optics | Eberhard A. Spiller, Paul B. Mirkarimi, Sasa Bajt, James A. Folta | 2000-10-17 |
| 6110607 | High reflectance-low stress Mo-Si multilayer reflective coatings | Paul B. Mirkarimi | 2000-08-29 |
| 6011646 | Method to adjust multilayer film stress induced deformation of optics | Paul B. Mirkarimi | 2000-01-04 |
| 5958605 | Passivating overcoat bilayer for multilayer reflective coatings for extreme ultraviolet lithography | Daniel G. Stearns, Stephen P. Vernon | 1999-09-28 |