Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11789187 | Method for producing a multilayer Laue lens | Henry N. Chapman, Mauro Prasciolu | 2023-10-17 |
| 10867717 | Optical element for deflecting x-rays | Mauro Prasciolu | 2020-12-15 |
| 7672430 | Area X-ray or UV camera system for high-intensity beams | Henry N. Chapman, Eberhard A. Spiller, Stefan Hau-Riege, Stefano Marchesini | 2010-03-02 |
| 6867149 | Growth of multi-component alloy films with controlled graded chemical composition on sub-nanometer scale | Stephen P. Vernon | 2005-03-15 |
| 6780496 | Optimized capping layers for EUV multilayers | James A. Folta, Eberhard A. Spiller | 2004-08-24 |
| 6590209 | Technique to quantitatively measure magnetic properties of thin structures at <10 NM spatial resolution | — | 2003-07-08 |
| 6396900 | Multilayer films with sharp, stable interfaces for use in EUV and soft X-ray application | Troy W. Barbee, Jr. | 2002-05-28 |
| 6319635 | Mitigation of substrate defects in reticles using multilayer buffer layers | Paul B. Mirkarimi, Daniel G. Stearns | 2001-11-20 |
| 6228512 | MoRu/Be multilayers for extreme ultraviolet applications | Mark A. Wall | 2001-05-08 |
| 6229652 | High reflectance and low stress Mo2C/Be multilayers | Troy W. Barbee, Jr. | 2001-05-08 |
| 6134049 | Method to adjust multilayer film stress induced deformation of optics | Eberhard A. Spiller, Paul B. Mirkarimi, Claude Montcalm, James A. Folta | 2000-10-17 |