Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7672430 | Area X-ray or UV camera system for high-intensity beams | Henry N. Chapman, Sasa Bajt, Stefan Hau-Riege, Stefano Marchesini | 2010-03-02 |
| 6849859 | Fabrication of precision optics using an imbedded reference surface | James A. Folta | 2005-02-01 |
| 6780496 | Optimized capping layers for EUV multilayers | Sasa Bajt, James A. Folta | 2004-08-24 |
| 6634760 | Low-cost method for producing extreme ultraviolet lithography optics | James A. Folta, Claude Montcalm, John S. Taylor | 2003-10-21 |
| 6134049 | Method to adjust multilayer film stress induced deformation of optics | Paul B. Mirkarimi, Claude Montcalm, Sasa Bajt, James A. Folta | 2000-10-17 |
| 5958143 | Cleaning process for EUV optical substrates | Frank J. Weber | 1999-09-28 |
| 4595261 | Phase retardation element and prism for use in an optical data storage system | Holger J. Baasch, Douglas S. Goodman, Francis S. Luecke, Ronald L. Soderstrom | 1986-06-17 |
| 4268952 | Method for fabricating self-aligned high resolution non planar devices employing low resolution registration | Fritz H. Gaensslen | 1981-05-26 |