Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10901121 | Planarization of optical substrates | Christopher J. Stolz, Paul B. Mirkarimi, Regina Soufli, Christopher C. Walton, Justin Wolfe +2 more | 2021-01-26 |
| 7473301 | Adhesive particle shielding | Leonard E. Klebanoff, Daniel J. Rader, Christopher C. Walton | 2009-01-06 |
| 7062348 | Dynamic mask for producing uniform or graded-thickness thin films | — | 2006-06-13 |
| 6849859 | Fabrication of precision optics using an imbedded reference surface | Eberhard A. Spiller | 2005-02-01 |
| 6844272 | Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers | John S. Taylor, Claude Montcalm | 2005-01-18 |
| 6780496 | Optimized capping layers for EUV multilayers | Sasa Bajt, Eberhard A. Spiller | 2004-08-24 |
| 6668207 | Method and system using power modulation and velocity modulation producing sputtered thin films with sub-angstrom thickness uniformity or custom thickness gradients | Claude Montcalm, Christopher C. Walton | 2003-12-23 |
| 6634760 | Low-cost method for producing extreme ultraviolet lithography optics | Claude Montcalm, John S. Taylor, Eberhard A. Spiller | 2003-10-21 |
| 6562404 | Conformal chemically resistant coatings for microflow devices | Mark Zdeblick | 2003-05-13 |
| 6524449 | Method and system for producing sputtered thin films with sub-angstrom thickness uniformity or custom thickness gradients | Claude Montcalm, Christopher C. Walton | 2003-02-25 |
| 6425988 | Method and system using power modulation for maskless vapor deposition of spatially graded thin film and multilayer coatings with atomic-level precision and accuracy | Claude Montcalm, Swie-In Tan, Ira Reiss | 2002-07-30 |
| 6134049 | Method to adjust multilayer film stress induced deformation of optics | Eberhard A. Spiller, Paul B. Mirkarimi, Claude Montcalm, Sasa Bajt | 2000-10-17 |
| 6056331 | Zero dead volume tube to surface seal | William J. Benett | 2000-05-02 |
| 5783130 | Fabrication method for miniature plastic gripper | William J. Benett, Peter Krulevitch, Abraham P. Lee, Milton A. Northrup | 1998-07-21 |
| 5644395 | Miniaturized flow injection analysis system | — | 1997-07-01 |
| 5609608 | Miniature plastic gripper and fabrication method | William J. Benett, Peter Krulevitch, Abraham P. Lee, Milton A. Northrup | 1997-03-11 |