Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12297960 | Flow assist vent mast | Myra L. Blaylock | 2025-05-13 |
| 11192783 | Ternary borides and borohydrides for hydrogen storage and method of synthesis | Vitalie Stavila | 2021-12-07 |
| 10000377 | Nanostructured metal amides and nitrides for hydrogen storage | Vitalie Stavila | 2018-06-19 |
| 9759912 | Particle and chemical control using tunnel flow | Frank Chilese, Gildardo Delgado, Daniel Wack, John R. Torczynski | 2017-09-12 |
| 9389180 | Methods and apparatus for use with extreme ultraviolet light having contamination protection | Francis Chilese, John R. Torczynski, Rudy F. Garcia, Gildardo Delgado, Daniel J. Rader +2 more | 2016-07-12 |
| 9244368 | Particle control near reticle and optics using showerhead | Gildardo Delgado, Frank Chilese, Rudy F. Garcia, John R. Torczynski, Anthony S. Geller +2 more | 2016-01-26 |
| 9156068 | Methods and apparatus for cleaning objects in a chamber of an optical instrument by generating reactive ions using photon radiation | Gildardo Delgado, Jeromy T. Hollenshead, Karl R. Umstadter, Elena Starodub, Guorong V. Zhuang | 2015-10-13 |
| 8439534 | Mobile lighting apparatus | George M. Roe, Gerald W. Rea, Robert A. Drake, Terry A. Johnson, Steven John Wingert +7 more | 2013-05-14 |
| 7740916 | Method for the protection of extreme ultraviolet lithography optics | Philip Grunow, Wayne M. Clift | 2010-06-22 |
| 7473301 | Adhesive particle shielding | Daniel J. Rader, Christopher C. Walton, James A. Folta | 2009-01-06 |
| 7147722 | Method for in-situ cleaning of carbon contaminated surfaces | Philip Grunow, Samuel Graham, Jr. | 2006-12-12 |
| 6989629 | Method and apparatus for debris mitigation for an electrical discharge source | Daniel J. Rader, William T. Silfvast | 2006-01-24 |
| 6888297 | Method and apparatus for debris mitigation for an electrical discharge source | William T. Silfvast, Daniel J. Rader | 2005-05-03 |
| 6772776 | Apparatus for in situ cleaning of carbon contaminated surfaces | Philip Grunow, Samuel Graham, Jr. | 2004-08-10 |
| 6664554 | Self-cleaning optic for extreme ultraviolet lithography | Richard H. Stulen | 2003-12-16 |
| 6549264 | Extreme-UV lithography vacuum chamber zone seal | Steven J. Haney, Donald Joe Herron, William C. Replogle | 2003-04-15 |
| 6545745 | Extreme-UV lithography vacuum chamber zone seal | Steven J. Haney, Donald Joe Herron, William C. Replogle | 2003-04-08 |
| 6533952 | Mitigation of radiation induced surface contamination | Richard H. Stulen | 2003-03-18 |
| 6492067 | Removable pellicle for lithographic mask protection and handling | Daniel J. Rader, Scott D. Hector, Khanh B. Nguyen, Richard H. Stulen | 2002-12-10 |
| 6333775 | Extreme-UV lithography vacuum chamber zone seal | Steven J. Haney, Donald Joe Herron, William C. Replogle | 2001-12-25 |
| 6279601 | Liquid zone seal | — | 2001-08-28 |
| 6253464 | Method for protection of lithographic components from particle contamination | Daniel J. Rader | 2001-07-03 |
| 6231930 | Process for producing radiation-induced self-terminating protective coatings on a substrate | — | 2001-05-15 |
| 6232578 | Thermophoretic vacuum wand | Daniel J. Rader | 2001-05-15 |
| 6192897 | Apparatus and method for in-situ cleaning of resist outgassing windows | Steven J. Haney | 2001-02-27 |