| 9759912 |
Particle and chemical control using tunnel flow |
Frank Chilese, Gildardo Delgado, Daniel Wack, Leonard E. Klebanoff |
2017-09-12 |
| 9389180 |
Methods and apparatus for use with extreme ultraviolet light having contamination protection |
Francis Chilese, Rudy F. Garcia, Leonard E. Klebanoff, Gildardo Delgado, Daniel J. Rader +2 more |
2016-07-12 |
| 9244368 |
Particle control near reticle and optics using showerhead |
Gildardo Delgado, Frank Chilese, Rudy F. Garcia, Anthony S. Geller, Daniel J. Rader +2 more |
2016-01-26 |
| 8753439 |
Process and apparatus for separation of components of a gas stream |
Charles R. Bryan, Patrick V. Brady, Michail A. Gallis, Carlton F. Brooks |
2014-06-17 |
| 8585801 |
Process and apparatus for separation of components of a gas stream |
Charles R. Bryan, Patrick V. Brady, Michail A. Gallis, Carlton F. Brooks |
2013-11-19 |
| 8535424 |
Process and apparatus for separation of components of a gas stream |
Charles R. Bryan, Patrick V. Brady, Michail A. Gallis, Carlton F. Brooks |
2013-09-17 |
| 6664550 |
Apparatus to collect, classify, concentrate, and characterize gas-borne particles |
Daniel J. Rader, Karl Wally, John E. Brockmann |
2003-12-16 |
| 6386015 |
Apparatus to collect, classify, concentrate, and characterize gas-borne particles |
Daniel J. Rader, Karl Wally, John E. Brockmann |
2002-05-14 |
| 6348687 |
Aerodynamic beam generator for large particles |
John E. Brockmann, Ronald C. Dykhuizen, Richard A. Neiser, Mark F. Smith |
2002-02-19 |
| 6193601 |
Module bay with directed flow |
— |
2001-02-27 |
| 6165267 |
Spin coating apparatus |
— |
2000-12-26 |
| 6156212 |
Opposed-flow virtual cyclone for particle concentration |
Daniel J. Rader |
2000-12-05 |