Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12044313 | Dual vacuum seal | Shannon Hill | 2024-07-23 |
| 10953441 | System and method for cleaning optical surfaces of an extreme ultraviolet optical system | Gildardo Delgado, Rudy F. Garcia, Mohammed Tahmassebpur, Salam Harb | 2021-03-23 |
| 9851643 | Apparatus and methods for reticle handling in an EUV reticle inspection tool | Ulrich Pohlmann, Detlef Wolter, Joseph F. Walsh | 2017-12-26 |
| 9422978 | Gas bearing assembly for an EUV light source | Rudy F. Garcia | 2016-08-23 |
| 9389180 | Methods and apparatus for use with extreme ultraviolet light having contamination protection | John R. Torczynski, Rudy F. Garcia, Leonard E. Klebanoff, Gildardo Delgado, Daniel J. Rader +2 more | 2016-07-12 |
| 8963110 | Continuous generation of extreme ultraviolet light | Layton Hale, Qiang Zhang | 2015-02-24 |
| 6424879 | System and method to correct for distortion caused by bulk heating in a substrate | Bassam Shamoun, David Trost | 2002-07-23 |