Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9851643 | Apparatus and methods for reticle handling in an EUV reticle inspection tool | Francis Chilese, Ulrich Pohlmann, Joseph F. Walsh | 2017-12-26 |
| 7277190 | Measurement system with an optical measurement arrangement | Matthias Slodowski | 2007-10-02 |
| 6456373 | Method and apparatus for monitoring the light emitted from an illumination apparatus for an optical measuring instrument | Joachim Wienecke, Kuno Backhaus, Matthias Slodowski, Horst-Dieter Jaritz | 2002-09-24 |
| 5601078 | Breathing apparatus with a display unit | Uwe Schaller, Hansjochen Schuck, Ralf Drews | 1997-02-11 |