Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7084965 | Arrangement and method for inspecting unpatterned wafers | Joachim Wienecke | 2006-08-01 |
| 6618154 | Optical measurement arrangement, in particular for layer thickness measurement | Horst Engel, Hakon Mikkelsen, Lambert Danner, Matthias Slodowski, Joachim Wienecke | 2003-09-09 |
| 6456373 | Method and apparatus for monitoring the light emitted from an illumination apparatus for an optical measuring instrument | Joachim Wienecke, Detlef Wolter, Matthias Slodowski, Horst-Dieter Jaritz | 2002-09-24 |