Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7489394 | Apparatus for inspecting a disk-like object | Thomas Krieg | 2009-02-10 |
| 7242467 | Method and apparatus for high-resolution defect location and classification | — | 2007-07-10 |
| 7152488 | System operating unit | Roland Hedrich, Karsten Urban | 2006-12-26 |
| 7084965 | Arrangement and method for inspecting unpatterned wafers | Kuno Backhaus | 2006-08-01 |
| 7041952 | Method for automatic focusing an imaging optical system on the surface of a sample | Thomas Iffland, Gert Weniger | 2006-05-09 |
| 7002740 | Setting module for the illumination of an optical instrument | Michael Veith, Uwe Graf | 2006-02-21 |
| 6985237 | Method for determining layer thickness ranges | Hakon Mikkelsen | 2006-01-10 |
| 6962471 | Substrate conveying module and system made up of substrate conveying module and workstation | Andreas Birkner, Knut Hiltawski, Karsten Urban | 2005-11-08 |
| 6941009 | Method for evaluating pattern defects on a water surface | — | 2005-09-06 |
| 6920249 | Method and measuring instrument for determining the position of an edge of a pattern element on a substrate | Klaus Rinn, Wolfgang Fricke | 2005-07-19 |
| 6918735 | Holding device for wafers | Karsten Urban, Winfried Deutscher | 2005-07-19 |
| 6826511 | Method and apparatus for the determination of layer thicknesses | Hakon Mikkelsen, Horst Engel | 2004-11-30 |
| 6713746 | Arrangement and method for illuminating a specimen field in an optical instrument | Michael Veith, Uwe Graf | 2004-03-30 |
| 6696679 | Method for focusing of disk-shaped objects with patterned surfaces during imaging | Michael A. Graef, Uwe Graf, Guenter Hoffmann, Karl-Heinz Franke, Lutz Jakob | 2004-02-24 |
| 6618154 | Optical measurement arrangement, in particular for layer thickness measurement | Horst Engel, Hakon Mikkelsen, Lambert Danner, Matthias Slodowski, Kuno Backhaus | 2003-09-09 |
| 6504608 | Optical measurement arrangement and method for inclination measurement | Klaus Hallmeyer, Guenter Hoffmann | 2003-01-07 |
| 6456373 | Method and apparatus for monitoring the light emitted from an illumination apparatus for an optical measuring instrument | Kuno Backhaus, Detlef Wolter, Matthias Slodowski, Horst-Dieter Jaritz | 2002-09-24 |
| 6075880 | Method for detection of defects in the inspection of structured surfaces | Dietmar Kollhof, Karl-Heinz Franke, Michael A. Graef, Heiko-Ulrich Klaus Kempe | 2000-06-13 |