| 8154718 |
Apparatus and method for inspecting micro-structured devices on a semiconductor substrate |
Lambert Danner |
2012-04-10 |
| 7271889 |
Device and method for inspecting an object |
Franz Cemic, Lambert Danner, Robert Mainberger, Dirk Sönksen, Volker Knorz |
2007-09-18 |
| 7002740 |
Setting module for the illumination of an optical instrument |
Michael Veith, Joachim Wienecke |
2006-02-21 |
| 6879440 |
Autofocus module and method for a microscope-based system |
Franz Cemic, Lambert Danner, Robert Mainberger, Michael Veith, Martin Osterfeld |
2005-04-12 |
| 6713746 |
Arrangement and method for illuminating a specimen field in an optical instrument |
Michael Veith, Joachim Wienecke |
2004-03-30 |
| 6696679 |
Method for focusing of disk-shaped objects with patterned surfaces during imaging |
Michael A. Graef, Joachim Wienecke, Guenter Hoffmann, Karl-Heinz Franke, Lutz Jakob |
2004-02-24 |