| 9091525 |
Method for focusing an object plane and optical assembly |
Wolfgang Sulik, Alexander Buettner |
2015-07-28 |
| 8451440 |
Apparatus for the optical inspection of wafers |
Kurt Hahn, Roland Hedrich, Gerhard Hoppen, Albert Kreh, Wolfgang Vollrath +4 more |
2013-05-28 |
| 8154718 |
Apparatus and method for inspecting micro-structured devices on a semiconductor substrate |
Uwe Graf |
2012-04-10 |
| 7561263 |
Apparatus for illuminating and inspecting a surface |
Michael Heiden, Alexander Buettner |
2009-07-14 |
| 7420670 |
Measuring instrument and method for operating a measuring instrument for optical inspection of an object |
Klaus Rinn |
2008-09-02 |
| 7271889 |
Device and method for inspecting an object |
Franz Cemic, Uwe Graf, Robert Mainberger, Dirk Sönksen, Volker Knorz |
2007-09-18 |
| 7268940 |
Illuminating device |
Michael Veith |
2007-09-11 |
| 7209243 |
Illumination device, and coordinate measuring instrument having an illumination device |
Franz Cemic, Gerhard Hoppen |
2007-04-24 |
| 6975409 |
Illumination device; and coordinate measuring instrument having an illumination device |
Franz Cemic, Gerhard Hoppen |
2005-12-13 |
| 6943901 |
Critical dimension measuring instrument |
Franz Cemic |
2005-09-13 |
| 6879440 |
Autofocus module and method for a microscope-based system |
Franz Cemic, Robert Mainberger, Michael Veith, Martin Osterfeld, Uwe Graf |
2005-04-12 |
| 6624930 |
Illumination device for a DUV microscope and DUV microscope |
Frank Eisenkrämer, Michael Veith, Wolfgang Vollrath, Martin Osterfeld |
2003-09-23 |
| 6618154 |
Optical measurement arrangement, in particular for layer thickness measurement |
Horst Engel, Hakon Mikkelsen, Matthias Slodowski, Kuno Backhaus, Joachim Wienecke |
2003-09-09 |
| 6600560 |
Optical measurement arrangement having an ellipsometer |
Hakon Mikkelsen, Horst Engel, Christof Stey |
2003-07-29 |
| 4417787 |
Five-component microscope objective |
— |
1983-11-29 |
| 4384765 |
Six-component microscope objective |
— |
1983-05-24 |