Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Measuring instrument and method for operating a measuring instrument for optical inspection of an object

Measuring instrument and method for operating a measuring instrument for optical inspection of an object

US Patent 7420670 · Granted Sep 2, 2008

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for focusing an object plane and optical assembly2015
Apparatus for the optical inspection of wafers2013
Method for determining positions of structures on a mask2012
Apparatus and method for inspecting micro-structured devices on a semiconductor 2012
Coordinate measuring machine and method for calibrating the coordinate measuring2012
Method for reproducibly determining geometrical and/or optical object characteri2011
Device and method for determining an optical property of a mask2011
Method for calibration of a measuring table of a coordinate measuring machine2010
Method for eliminating sources of error in the system correction of a coordinate2010
Method for correcting an error of the imaging system of a coordinate measuring m2010
Method for improving the reproducibility of a coordinate measuring apparatus and2010
Apparatus for illuminating and inspecting a surface2009