Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8248618 | Method for determining positions of structures on a mask | Andreas Schaaf, Andre Schepp | 2012-08-21 |
| 8115808 | Coordinate measuring machine and method for calibrating the coordinate measuring machine | Wolfgang Fricke, Slawomir Czerkas | 2012-02-14 |
| 7939789 | Method for reproducibly determining geometrical and/or optical object characteristics | Michael Heiden, Andreas Schaaf | 2011-05-10 |
| 7864319 | Device and method for determining an optical property of a mask | Hans-Artur Boesser, Michael Heiden, Frank Laske | 2011-01-04 |
| 7823295 | Method for calibration of a measuring table of a coordinate measuring machine | — | 2010-11-02 |
| 7694426 | Method for eliminating sources of error in the system correction of a coordinate measuring machine | Michael Heiden | 2010-04-13 |
| 7680616 | Method for correcting an error of the imaging system of a coordinate measuring machine | Michael Heiden | 2010-03-16 |
| 7654007 | Method for improving the reproducibility of a coordinate measuring apparatus and its accuracy | Michael Heiden, Andreas Schaaf | 2010-02-02 |
| 7548321 | Method for enhancing the measuring accuracy when determining the coordinates of structures on a substrate | — | 2009-06-16 |
| 7420670 | Measuring instrument and method for operating a measuring instrument for optical inspection of an object | Lambert Danner | 2008-09-02 |
| 6924900 | Method and microscope for detection of a specimen | — | 2005-08-02 |
| 6920249 | Method and measuring instrument for determining the position of an edge of a pattern element on a substrate | Wolfgang Fricke, Joachim Wienecke | 2005-07-19 |
| 6825939 | Method and measuring arrangement for detecting an object | — | 2004-11-30 |
| 6816263 | Interferometric measurement apparatus for wavelength calibration | Ulrich Kaczynski | 2004-11-09 |
| 6559458 | Measuring instrument and method for measuring features on a substrate | — | 2003-05-06 |
| 6549648 | Method for determining a position of a structural element on a substrate | — | 2003-04-15 |
| 6323953 | Method and device for measuring structures on a transparent substrate | Carola Blaesing-Bangert, Ulrich Kaczynski, Mathias Beck | 2001-11-27 |
| 6317991 | Method for correcting measurement errors in a machine measuring co-ordinates | — | 2001-11-20 |
| 6008902 | Method and device for heterodyne interferometer error correction | — | 1999-12-28 |