Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10303153 | Method and computer program product for controlling the positioning of patterns on a substrate in a manufacturing process | Frank Laske | 2019-05-28 |
| 9424636 | Method for measuring positions of structures on a mask and thereby determining mask manufacturing errors | Frank Laske, Mohammad Mehdi Daneshpanah, Mark Wagner | 2016-08-23 |
| 8149383 | Method for determining the systematic error in the measurement of positions of edges of structures on a substrate resulting from the substrate topology | — | 2012-04-03 |
| 8115808 | Coordinate measuring machine and method for calibrating the coordinate measuring machine | Wolfgang Fricke, Klaus Rinn | 2012-02-14 |
| 7826068 | Method for correcting measured values resulting from the bending of a substrate | — | 2010-11-02 |