Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156927 | System and method for switching between an EUV pellicle and an optical pellicle | Daniel Andrew Smith | 2021-10-26 |
| 10395361 | Apparatus and methods for inspecting reticles | Abdurrahman Sezginer | 2019-08-27 |
| 9424636 | Method for measuring positions of structures on a mask and thereby determining mask manufacturing errors | Frank Laske, Slawomir Czerkas, Mark Wagner | 2016-08-23 |
| 9311700 | Model-based registration and critical dimension metrology | Abdurrahman Sezginer | 2016-04-12 |
| 8737756 | System and method for depth from defocus imaging | Kevin George Harding, Gil Abramovich, Daniel Curtis Gray | 2014-05-27 |
| 8340456 | System and method for depth from defocus imaging | Kevin George Harding, Gil Abramovich, Daniel Curtis Gray | 2012-12-25 |