Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8115808 | Coordinate measuring machine and method for calibrating the coordinate measuring machine | Klaus Rinn, Slawomir Czerkas | 2012-02-14 |
| 7978340 | System and method for determining positions of structures on a substrate | Hans-Artur Boesser, Michael Heiden | 2011-07-12 |
| 7584072 | Method for determining correction values for the measured values of positions of structures on a substrate | Linda Gundal | 2009-09-01 |
| 7551296 | Method for determining the focal position of at least two edges of structures on a substrate | Hans-Artur Boesser, Klaus-Dieter Adam | 2009-06-23 |
| 6920249 | Method and measuring instrument for determining the position of an edge of a pattern element on a substrate | Klaus Rinn, Joachim Wienecke | 2005-07-19 |