Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8351049 | Interferometric device for position measurement and coordinate measuring machine | Siegfried Peter Kluge, Joerg Lenz, Gerhard Joseph Nickel | 2013-01-08 |
| 8154595 | Device and method for automatic detection of incorrect measurements by means of quality factors | Michael Heiden, Klaus-Dieter Adam | 2012-04-10 |
| 7982950 | Measuring system for structures on a substrate for semiconductor manufacture | Walter Steinberg | 2011-07-19 |
| 7978340 | System and method for determining positions of structures on a substrate | Wolfgang Fricke, Michael Heiden | 2011-07-12 |
| 7961334 | Coordinate measuring machine for measuring structures on a substrate | Michael Heiden, Klaus-Dieter Adam | 2011-06-14 |
| 7864319 | Device and method for determining an optical property of a mask | Michael Heiden, Klaus Rinn, Frank Laske | 2011-01-04 |
| 7551296 | Method for determining the focal position of at least two edges of structures on a substrate | Wolfgang Fricke, Klaus-Dieter Adam | 2009-06-23 |
| 7450246 | Measuring device and method for determining relative positions of a positioning stage configured to be moveable in at least one direction | Klaus-Dieter Adam | 2008-11-11 |