Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8582113 | Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device | — | 2013-11-12 |
| 8390927 | Element for homogenizing the illumination with simultaneous setting of the polarization degree | — | 2013-03-05 |
| 8305587 | Apparatus for the optical inspection of wafers | — | 2012-11-06 |
| 8154595 | Device and method for automatic detection of incorrect measurements by means of quality factors | Hans-Artur Boesser, Klaus-Dieter Adam | 2012-04-10 |
| 8102541 | Apparatus and method for measuring structures on a mask and or for calculating structures in a photoresist resulting from the structures | — | 2012-01-24 |
| D644289 | Decorative deerskin arrowhead | — | 2011-08-30 |
| 7986409 | Method for determining the centrality of masks | — | 2011-07-26 |
| 7978340 | System and method for determining positions of structures on a substrate | Hans-Artur Boesser, Wolfgang Fricke | 2011-07-12 |
| 7961334 | Coordinate measuring machine for measuring structures on a substrate | Hans-Artur Boesser, Klaus-Dieter Adam | 2011-06-14 |
| 7939789 | Method for reproducibly determining geometrical and/or optical object characteristics | Klaus Rinn, Andreas Schaaf | 2011-05-10 |
| 7929149 | Coordinate measuring machine and a method for correcting non-linearities of the interferometers of a coordinate measuring machine | — | 2011-04-19 |
| 7903259 | Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device | — | 2011-03-08 |
| 7889338 | Coordinate measuring machine and method for structured illumination of substrates | — | 2011-02-15 |
| 7864319 | Device and method for determining an optical property of a mask | Hans-Artur Boesser, Klaus Rinn, Frank Laske | 2011-01-04 |
| D627029 | Arrow rest | — | 2010-11-09 |
| 7769556 | Method for correcting measuring errors caused by the lens distortion of an objective | Klaus-Dieter Adam | 2010-08-03 |
| 7694426 | Method for eliminating sources of error in the system correction of a coordinate measuring machine | Klaus Rinn | 2010-04-13 |
| 7680616 | Method for correcting an error of the imaging system of a coordinate measuring machine | Klaus Rinn | 2010-03-16 |
| 7654007 | Method for improving the reproducibility of a coordinate measuring apparatus and its accuracy | Klaus Rinn, Andreas Schaaf | 2010-02-02 |
| 7602824 | Device and method for supplying short-wavelength light | — | 2009-10-13 |
| 7561263 | Apparatus for illuminating and inspecting a surface | Lambert Danner, Alexander Buettner | 2009-07-14 |
| 7545489 | Apparatus and method of inspecting the surface of a wafer | Wolfgang Sulik | 2009-06-09 |
| 7382450 | Method of detecting an edge bead removal line on a wafer | — | 2008-06-03 |