Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9091525 | Method for focusing an object plane and optical assembly | Lambert Danner, Alexander Buettner | 2015-07-28 |
| 7545489 | Apparatus and method of inspecting the surface of a wafer | Michael Heiden | 2009-06-09 |
| 7262909 | Illumination apparatus for an optical system and microscope | Hans-Artur Bosser | 2007-08-28 |
| 6984947 | Apparatus and method for adjusting components of an optical or mechanical system | — | 2006-01-10 |