Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8154595 | Device and method for automatic detection of incorrect measurements by means of quality factors | Hans-Artur Boesser, Michael Heiden | 2012-04-10 |
| 7961334 | Coordinate measuring machine for measuring structures on a substrate | Hans-Artur Boesser, Michael Heiden | 2011-06-14 |
| 7948635 | Method for determining positions of structures on a substrate | Katrin Pietsch, Tillmann Ehrenberg | 2011-05-24 |
| 7872763 | Device for measuring the position of at least one structure on a substrate | Katrin Pietsch, Tillmann Ehrenberg | 2011-01-18 |
| 7769556 | Method for correcting measuring errors caused by the lens distortion of an objective | Michael Heiden | 2010-08-03 |
| 7551296 | Method for determining the focal position of at least two edges of structures on a substrate | Hans-Artur Boesser, Wolfgang Fricke | 2009-06-23 |
| 7450246 | Measuring device and method for determining relative positions of a positioning stage configured to be moveable in at least one direction | Hans-Artur Boesser | 2008-11-11 |
| 7053388 | Dual-mode electron beam lithography machine | Nigel Crosland, Timothy R. Groves, Jeffrey Kristoff, Brian Rafferty, Gerhard Schubert | 2006-05-30 |
| 6736554 | Low-stress internal structure for optoelectronic housing | Sylvaine Kerboeuf, Emmanuel Grard, Claude Artigue, Pierre J. Laroulandie, Alwin Goeth | 2004-05-18 |
| 5159912 | Apparatus for electronic engine control with performance check for the final ignition stage | Hermann Klein, Juergen Wuerth | 1992-11-03 |
| 5094208 | Fuel control system | Heinz Bohmler | 1992-03-10 |
| 4499750 | Drawing device for presses with mechanically driven drawing ram | Heinz J. Gerber, Heinz Horn | 1985-02-19 |