Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7948635 | Method for determining positions of structures on a substrate | Katrin Pietsch, Klaus-Dieter Adam | 2011-05-24 |
| 7906978 | Device for measuring or inspecting substrates of the semiconductor industry | — | 2011-03-15 |
| 7872763 | Device for measuring the position of at least one structure on a substrate | Katrin Pietsch, Klaus-Dieter Adam | 2011-01-18 |
| 7817262 | Device for measuring positions of structures on a substrate | Uwe Goetz, Guenter Schieferstein | 2010-10-19 |