Uwe Goetz

VG Vistec Semiconductor Systems Gmbh: 1 patents #20 of 55Top 40%

📍 Solms, DE: #53 of 110 inventorsTop 50%

Overall (All Time): #3,306,467 of 4,157,543Top 80%

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Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
7817262	Device for measuring positions of structures on a substrate	Tillmann Ehrenberg, Guenter Schieferstein	2010-10-19