Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7053388 | Dual-mode electron beam lithography machine | Nigel Crosland, Klaus-Dieter Adam, Timothy R. Groves, Brian Rafferty, Gerhard Schubert | 2006-05-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7053388 | Dual-mode electron beam lithography machine | Nigel Crosland, Klaus-Dieter Adam, Timothy R. Groves, Brian Rafferty, Gerhard Schubert | 2006-05-30 |