Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7982950 | Measuring system for structures on a substrate for semiconductor manufacture | Hans-Artur Boesser | 2011-07-19 |
| 7416819 | Test mask for optical and electron optical systems | Gerhard Schlueter, Michael Ferber | 2008-08-26 |