Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12353126 | Method and device for qualifying a mask of a lithography system | Asad Rasool, Steffen Weissenberg | 2025-07-08 |
| 12321091 | Device and method for determining placements of pattern elements of a reflective photolithographic mask in the operating environment thereof | — | 2025-06-03 |
| 11243464 | Method and apparatus for transforming measurement data of a photolithographic mask for the EUV range from first surroundings into second surroundings | — | 2022-02-08 |
| 10585274 | Method for capturing and compensating ambient effects in a measuring microscope | Dirk Seidel, Oliver Jaeckel | 2020-03-10 |
| 9528825 | Method for calibrating a position-measuring system and position-measuring system | Alexander Huebel | 2016-12-27 |
| 9354048 | Method for measuring a lithography mask or a mask blank | — | 2016-05-31 |
| 7081963 | Substrate holder, and use of the substrate holder in a highly accurate measuring instrument | Ulrich Kaczynski | 2006-07-25 |
| 6816253 | Substrate holder, and use of the substrate holder in a highly accurate measuring instrument | Ulrich Kaczynski | 2004-11-09 |
| 6778260 | Coordinate measuring stage and coordinate measuring instrument | Ulrich Kaczynski | 2004-08-17 |
| 6441899 | Apparatus and method for loading substrates of various sizes into substrate holders | Ulrich Kaczynski | 2002-08-27 |
| 6377870 | Device and method for delivering various transparent substrates into a high-precision measuring instrument | Ulrich Kaczynski | 2002-04-23 |
| 6323953 | Method and device for measuring structures on a transparent substrate | Klaus Rinn, Ulrich Kaczynski, Mathias Beck | 2001-11-27 |
| 6226087 | Method for measuring the positions of structures on a mask surface | — | 2001-05-01 |