Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12135211 | Device for measuring a substrate and method for correcting cyclic error components of an interferometer | Stephan Zschaeck, Uwe Horn, Thomas Kutzner | 2024-11-05 |
| 11880145 | Method for measuring a substrate for semiconductor lithography | Sven Martin | 2024-01-23 |
| 10585274 | Method for capturing and compensating ambient effects in a measuring microscope | Dirk Seidel, Carola Blaesing-Bangert | 2020-03-10 |