Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11425346 | Device and method for providing a multi-coloured light beam for a projector, projector and method of production | Tobias Graf | 2022-08-23 |
| 11360270 | MEMS optical switch with stop control | Ning Wang, Christoph Schelling, Hartmut Kueppers, Stefan Pinter, Uma Krishnamoorthy | 2022-06-14 |
| 11340399 | In-plane MEMS optical switch | Ning Wang, Christoph Schelling, Jan Niklas Caspers, Hartmut Kueppers, Stefan Pinter | 2022-05-24 |
| 11307483 | MEMS optical switch with dual cantilever couplers | Zilun Gong, Ning Wang, Tobias Graf | 2022-04-19 |
| 11300852 | MEMS optical switch with a cantilever coupler | Ning Wang, Christoph Schelling, Jan Niklas Caspers, Hartmut Kueppers, Stefan Pinter | 2022-04-12 |
| 9857269 | Testing device for an EUV optical system | Thomas Niederhausen | 2018-01-02 |
| 9528825 | Method for calibrating a position-measuring system and position-measuring system | Carola Blaesing-Bangert | 2016-12-27 |
| 8473237 | Method for calibrating a specimen stage of a metrology system and metrology system comprising a specimen stage | Matthias Manger, Gerd Klose, Uwe Schellhorn, Michael Arnz | 2013-06-25 |