Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11566321 | Temperature control roller, transporting arrangement and vacuum arrangement | Uwe Wehner, Thomas Puensch, Richard Zahn | 2023-01-31 |
| 11175595 | Method for localizing assembly errors | Christoph Fetzer | 2021-11-16 |
| 9857269 | Testing device for an EUV optical system | Alexander Huebel | 2018-01-02 |