Issued Patents All Time
Showing 25 most recent of 87 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12297541 | Method for producing a nanoscale channel structure | — | 2025-05-13 |
| 11959802 | Spectrometer device and method for producing a spectrometer device | Ralf Noltemeyer, Martin Husnik, Eugen Baumgart, Marc Schmid, Reinhold Roedel +2 more | 2024-04-16 |
| 11754445 | Interferometer element, spectrometer and method for operating an interferometer | Ralf Noltemeyer, Benedikt Stein, Christian Huber, Christoph Daniel Kraemmer, Reinhold Roedel | 2023-09-12 |
| 11733068 | Readout signal generator and method for operating a capacitive device | Kerrin Doessel | 2023-08-22 |
| 11709354 | Micromechanical mirror device, mirror system, and method for producing a micromechanical mirror device | Christian Huber, Marc Schmid, Reinhold Roedel, Christoph Daniel Kraemmer | 2023-07-25 |
| 11604093 | Spectrometer device and method for producing a spectrometer device | Martin Husnik, Christian Huber, Reinhold Roedel, Benedikt Stein | 2023-03-14 |
| 11401157 | Micromechanical sensor device with improved liquid tightness protection | Christian Doering, Franziska Rohlfing, Johannes Kenntner, Thomas Friedrich, Timo Lindemann | 2022-08-02 |
| 11391629 | Interferometer and method for producing an interferometer | Ralf Noltemeyer, Christian Huber, Reinhold Roedel, Benedikt Stein, Christoph Daniel Kraemmer | 2022-07-19 |
| 11360270 | MEMS optical switch with stop control | Ning Wang, Alexander Huebel, Hartmut Kueppers, Stefan Pinter, Uma Krishnamoorthy | 2022-06-14 |
| 11340399 | In-plane MEMS optical switch | Ning Wang, Alexander Huebel, Jan Niklas Caspers, Hartmut Kueppers, Stefan Pinter | 2022-05-24 |
| 11300852 | MEMS optical switch with a cantilever coupler | Ning Wang, Alexander Huebel, Jan Niklas Caspers, Hartmut Kueppers, Stefan Pinter | 2022-04-12 |
| 10988373 | MEMS component having low-resistance wiring and method for manufacturing it | — | 2021-04-27 |
| 10954120 | Micromechanical sensor that includes a stress decoupling structure | Jochen Beintner | 2021-03-23 |
| 10830590 | Micromechanical sensor | Ricardo Zamora | 2020-11-10 |
| 10781097 | Micromechanical component | — | 2020-09-22 |
| 10607888 | Method for producing a conductive through-plating for a substrate as well as conductive through-plating | Johannes Classen, Simon Genter | 2020-03-31 |
| 10383177 | Micro heating plate device and sensor having a micro heating plate device | Richard Fix | 2019-08-13 |
| 10217926 | Method for producing a multi-layer electrode system | Tjalf Pirk, Andreas Krauss, Friedjof Heuck, Stefan Leidich | 2019-02-26 |
| 10051355 | Circuit board for a microphone component part, and microphone module having such a circuit board | Jochen Zoellin, Ricardo Ehrenpfordt | 2018-08-14 |
| 10035696 | MEMS component including a diaphragm element which is attached via a spring structure to the component layer structure | Fabian Purkl, Michael Stumber, Ricardo Ehrenpfordt, Rolf Scheben, Benedikt Stein | 2018-07-31 |
| 10011479 | MEMS structural component including a deflectable diaphragm and a fixed counter-element as well as a method for manufacturing it | Yvonne Bergmann, Jochen Reinmuth | 2018-07-03 |
| 10000374 | MEMS component | Benedikt Stein, Michael Stumber | 2018-06-19 |
| 9936298 | MEMS component including a sound-pressure-sensitive diaphragm element and piezosensitive signal detection | Thomas Buck, Fabian Purkl, Michael Stumber, Ricardo Ehrenpfordt, Rolf Scheben +1 more | 2018-04-03 |
| 9926188 | Sensor unit including a decoupling structure and manufacturing method therefor | Johannes Classen, Torsten Kramer, Hubert Benzel, Jens Frey, Daniel Christoph Meisel | 2018-03-27 |
| 9914636 | MEMS component including a sound-pressure-sensitive diaphragm element | Thomas Buck, Fabian Purkl, Michael Stumber, Rolf Scheben, Benedikt Stein | 2018-03-13 |