Issued Patents All Time
Showing 51–75 of 87 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9178018 | Manufacturing method for a micromechanical component and a corresponding micromechanical component | — | 2015-11-03 |
| 9162873 | Component and method for producing same | Jochen Zoellin, Ricardo Ehrenpfordt, Juergen Graf, Frederik Ante, Michael Curcic | 2015-10-20 |
| 9139418 | MEMS component | Jochen Zoellin | 2015-09-22 |
| 9131319 | Component having a micromechanical microphone structure | Jochen Zoellin, Ricardo Ehrenpfordt, Juergen Graf, Frederik Ante, Michael Curcic | 2015-09-08 |
| 9082882 | Microelectronic component and corresponding production process | Ando Feyh | 2015-07-14 |
| 9066180 | Component having a micromechanical microphone structure | Jochen Zoellin | 2015-06-23 |
| 9035413 | Semiconductor device with embedded converter element and production method for a semiconductor device with an embedded converter element | Georg Bischopink, Silvia Kronmueller | 2015-05-19 |
| 8929584 | Component having a micromechanical microphone structure | Jochen Zoellin | 2015-01-06 |
| 8901684 | Manufacturing method for a micromechanical component, corresponding composite component, and corresponding micromechanical component | Hubert Benzel, Frank Henning, Armin Scharping | 2014-12-02 |
| 8847336 | Micromechanical component having an inclined structure and corresponding manufacturing method | Tjalf Pirk, Stefan Pinter, Hubert Benzel, Heribert Weber, Michael Krueger +5 more | 2014-09-30 |
| 8816454 | Component having a micromechanical microphone pattern | Jochen Zoellin, Ricardo Ehrenpfordt, Juergen Graf, Frederik Ante, Michael Curcic | 2014-08-26 |
| 8749013 | Sensor and method for its production | Hubert Benzel, Simon Armbruster, Arnim Hoechst, Ando Feyh | 2014-06-10 |
| 8530261 | Method for producing a component, and sensor element | Torsten Kramer, Kathrin Knese, Hubert Benzel, Gregor Schuermann, Simon Armbruster | 2013-09-10 |
| 8492850 | Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type | Gerhard Lammel, Hubert Benzel, Matthias Illing, Franz Laermer, Silvia Kronmueller +4 more | 2013-07-23 |
| 8492855 | Micromechanical capacitive pressure transducer and production method | Gerhard Lammel, Hubert Benzel, Simon Armbruster, Joerg Brasas | 2013-07-23 |
| 8318544 | Method for manufacturing a plurality of thin chips and correspondingly manufactured thin chip | Hubert Benzel, Karl-Heinz Kraft | 2012-11-27 |
| 8232126 | Manufacturing method for a micromechanical component, corresponding composite component, and corresponding micromechanical component | Hubert Benzel, Frank Henning, Armin Scharping | 2012-07-31 |
| 8207585 | Method for producing a micromechanical component and mircomechanical component | Roman Schlosser, Heribert Weber | 2012-06-26 |
| 8148234 | Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure | Gerhard Lammel, Hubert Benzel, Matthias Illing, Franz Laermer, Silvia Kronmueller +4 more | 2012-04-03 |
| 7989263 | Method for manufacturing a micromechanical chip and a component having a chip of this type | Torsten Kramer, Christina Leinenbach | 2011-08-02 |
| 7918136 | Micromechanical sensor element | Joerg Muchow, Hubert Benzel, Simon Armbruster | 2011-04-05 |
| 7902615 | Micromechanical structure for receiving and/or generating acoustic signals, method for producing a micromechanical structure, and use of a micromechanical structure | Roman Schlosser, Stefan Weiss, Frank Fischer | 2011-03-08 |
| 7863072 | Micromechanical diaphragm sensor having a double diaphragm | Matthias Illing, Heribert Weber, Heiko Stahl, Stefan Weiss | 2011-01-04 |
| 7843025 | Micromechanical semiconductor sensor | Hubert Benzel, Frank Schaefer, Simon Armbruster, Gerhard Lammel, Joerg Brasas | 2010-11-30 |
| 7834409 | Micromechanical component and corresponding method for its manufacture | Frank Reichenbach, Franz Laermer, Silvia Kronmueller, Tino Fuchs, Christina Leinenbach | 2010-11-16 |