Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9517928 | Micromechanical functional apparatus, particularly a loudspeaker apparatus, and appropriate method of manufacture | Ricardo Ehrenpfordt, Mathias Bruendel, Andre Gerlach, Sonja Knies, Ando Feyh +1 more | 2016-12-13 |
| 9269831 | Micromechanical functional apparatus, particularly a loudspeaker apparatus, and appropriate method of manufacture | Ricardo Ehrenpfordt, Mathias Bruendel, Andre Gerlach, Sonja Knies, Ando Feyh +1 more | 2016-02-23 |
| 8981499 | MEMS chip package and method for manufacturing an MEMS chip package | Ricardo Ehrenpfordt, Mathias Bruendel, Andre Gerlach, Sonja Knies, Ando Feyh +1 more | 2015-03-17 |
| 8946090 | Method for etching a layer on a silicon semiconductor substrate | Volker Becker, Franz Laermer, Tino Fuchs | 2015-02-03 |
| 8637945 | Component having a micromechanical microphone structure, and method for its production | Frank Reichenbach, Thomas Buck, Jochen Zoellin, Franz Laermer, Ulrike Scholz +1 more | 2014-01-28 |
| 8529781 | Method for producing a component, in particular a micromechanical and/or microfluidic and/or microelectronic component, and component | Tino Fuchs | 2013-09-10 |
| 8501516 | Method for producing micromechanical patterns having a relief-like sidewall outline shape or an adjustable angle of inclination | Franz Laermer, Tino Fuchs | 2013-08-06 |
| 8492188 | Method for producing a micromechanical component | Heiko Stahl, Axel Franke, Jochen Reinmuth, Ando Feyh, Christian Rettig | 2013-07-23 |
| 8466042 | Method for manufacturing separated micromechanical components situated on a silicon substrate and components manufactured therefrom | Franz Laermer, Kathrin van Teeffelen | 2013-06-18 |
| 8353213 | Sensor element for sensing accelerations in three spatial directions | Jochen Zoellin, Axel Franke, Kathrin van Teeffelen | 2013-01-15 |
| 8182707 | Method for etching a layer on a substrate | Franz Laermer, Silvia Kronmueller, Tino Fuchs | 2012-05-22 |
| 7989263 | Method for manufacturing a micromechanical chip and a component having a chip of this type | Torsten Kramer, Christoph Schelling | 2011-08-02 |
| 7851248 | Method for producing a micromechanical component having a thin-layer capping | Silvia Kronmueller, Tino Fuchs, Ando Feyh, Marco Lammer | 2010-12-14 |
| 7834409 | Micromechanical component and corresponding method for its manufacture | Frank Reichenbach, Franz Laermer, Silvia Kronmueller, Christoph Schelling, Tino Fuchs | 2010-11-16 |
| 7262071 | Micromechanical component and suitable method for its manufacture | Franz Larmer, Silvia Kronmüller | 2007-08-28 |