Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9771257 | Electromechanical system having a controlled atmosphere, and method of fabricating same | Aaron Partridge, Markus Lutz | 2017-09-26 |
| 9035413 | Semiconductor device with embedded converter element and production method for a semiconductor device with an embedded converter element | Georg Bischopink, Christoph Schelling | 2015-05-19 |
| 8623686 | Microelectromechanical device including an encapsulation layer of which a portion is removed to expose a substantially planar surface having a portion that is disposed outside and above a chamber and including a field region on which integrated circuits are formed, and methods for fabricating same | Aaron Partridge, Markus Lutz | 2014-01-07 |
| 8492850 | Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type | Gerhard Lammel, Hubert Benzel, Matthias Illing, Franz Laermer, Paul Farber +4 more | 2013-07-23 |
| 8421167 | Microelectromechanical device including an encapsulation layer of which a portion is removed to expose a substantially planar surface having a portion that is disposed outside and above a chamber and including a field region on which integrated circuits are formed, and methods for fabricating same | Aaron Partridge, Markus Lutz | 2013-04-16 |
| 8329555 | Method for producing a capping wafer for a sensor | Frank Reichenbach, Franz Laermer, Andreas Scheurle | 2012-12-11 |
| 8287956 | Crack and residue free conformal deposited silicon oxide with predictable and uniform etching characteristics | Aaron Partridge, Markus Lutz | 2012-10-16 |
| 8182707 | Method for etching a layer on a substrate | Franz Laermer, Tino Fuchs, Christina Leinenbach | 2012-05-22 |
| 8148234 | Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure | Gerhard Lammel, Hubert Benzel, Matthias Illing, Franz Laermer, Paul Farber +4 more | 2012-04-03 |
| 8018077 | Electromechanical system having a controlled atmosphere, and method of fabricating same | Aaron Partridge, Markus Lutz | 2011-09-13 |
| 7898046 | Microelectromechanical systems encapsulation process | Markus Ulm, Brian Stark, Matthias Metz, Tino Fuchs, Franz Laermer | 2011-03-01 |
| 7859067 | Microelectromechanical device including an encapsulation layer of which a portion is removed to expose a substantially planar surface having a portion that is disposed outside and above a chamber and including a field region on which integrated circuits are formed and methods for fabricating same | Aaron Partridge, Markus Lutz | 2010-12-28 |
| 7851248 | Method for producing a micromechanical component having a thin-layer capping | Tino Fuchs, Ando Feyh, Christina Leinenbach, Marco Lammer | 2010-12-14 |
| 7834409 | Micromechanical component and corresponding method for its manufacture | Frank Reichenbach, Franz Laermer, Christoph Schelling, Tino Fuchs, Christina Leinenbach | 2010-11-16 |
| 7625603 | Crack and residue free conformal deposited silicon oxide with predictable and uniform etching characteristics | Aaron Partridge, Markus Lutz | 2009-12-01 |
| 7582514 | Microelectromechanical systems encapsulation process with anti-stiction coating | Cyril Vancura, Markus Ulm, Brian Stark, Matthias Metz, Tino Fuchs +1 more | 2009-09-01 |
| 7579206 | Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same | Markus Lutz, Aaron Partridge | 2009-08-25 |
| 7563633 | Microelectromechanical systems encapsulation process | Markus Ulm, Brian Stark, Matthias Metz, Tino Fuchs, Franz Laermer | 2009-07-21 |
| 7514283 | Method of fabricating electromechanical device having a controlled atmosphere | Aaron Partridge, Markus Lutz | 2009-04-07 |
| 7382031 | Component including a fixed element that is in a silicon layer and is mechanically connected to a substrate via an anchoring element and method for its manufacture | Ulf Wilhelm | 2008-06-03 |
| 7352040 | Microelectromechanical systems having trench isolated contacts, and methods for fabricating same | Aaron Partridge, Markus Lutz | 2008-04-01 |
| 7317233 | Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same | Markus Lutz, Aaron Partridge | 2008-01-08 |
| 7288824 | Microelectromechanical systems, and devices having thin film encapsulated mechanical structures | Aaron Partridge, Markus Lutz | 2007-10-30 |
| 7270868 | Micromechanical component | Thorsten Pannek, Udo Bischof, Jens Frey, Ulf Wilhelm | 2007-09-18 |
| 7075160 | Microelectromechanical systems and devices having thin film encapsulated mechanical structures | Aaron Partridge, Markus Lutz | 2006-07-11 |