Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9003885 | Tri-axis accelerometer having a single proof mass and fully differential output signals | Zhiyu Pan, Christoph Lang, Gary Yama, Markus Ulm | 2015-04-14 |
| 8418559 | Tri-axis accelerometer having a single proof mass and fully differential output signals | Zhiyu Pan, Christoph Lang, Gary Yama, Markus Ulm | 2013-04-16 |
| 8020266 | Method of producing a device | Markus Ulm, Brian Stark | 2011-09-20 |
| 7898046 | Microelectromechanical systems encapsulation process | Markus Ulm, Brian Stark, Tino Fuchs, Franz Laermer, Silvia Kronmueller | 2011-03-01 |
| 7757555 | Tri-axis accelerometer having a single proof mass and fully differential output signals | Zhiyu Pan, Christoph Lang, Gary Yama, Markus Ulm | 2010-07-20 |
| 7671515 | Microelectromechanical devices and fabrication methods | Zhiyu Pan, Brian Stark, Markus Ulm, Gary Yama | 2010-03-02 |
| 7625773 | Anti-stiction technique for electromechanical systems and electromechanical device employing same | Markus Lutz, Aaron Partridge, Wilhelm Frey, Markus Ulm, Brian Stark +1 more | 2009-12-01 |
| 7582514 | Microelectromechanical systems encapsulation process with anti-stiction coating | Cyril Vancura, Markus Ulm, Brian Stark, Tino Fuchs, Franz Laermer +1 more | 2009-09-01 |
| 7563633 | Microelectromechanical systems encapsulation process | Markus Ulm, Brian Stark, Tino Fuchs, Franz Laermer, Silvia Kronmueller | 2009-07-21 |
| 7449355 | Anti-stiction technique for electromechanical systems and electromechanical device employing same | Markus Lutz, Aaron Partridge, Wilhelm Frey, Markus Ulm, Brian Stark +1 more | 2008-11-11 |
| 7414351 | Energy harvesting device manufactured by print forming processes | Markus Ulm, Brian Stark | 2008-08-19 |
| 6288533 | Method and apparatus for detecting rotor position by use of magnetic field sensor pairs | Andreas Haeberli, Christoph Maier | 2001-09-11 |