Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7582514 | Microelectromechanical systems encapsulation process with anti-stiction coating | Markus Ulm, Brian Stark, Matthias Metz, Tino Fuchs, Franz Laermer +1 more | 2009-09-01 |