Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12324416 | Bait chasing system | — | 2025-06-10 |
| 9003885 | Tri-axis accelerometer having a single proof mass and fully differential output signals | Christoph Lang, Gary Yama, Matthias Metz, Markus Ulm | 2015-04-14 |
| 8418559 | Tri-axis accelerometer having a single proof mass and fully differential output signals | Christoph Lang, Gary Yama, Matthias Metz, Markus Ulm | 2013-04-16 |
| 8324986 | MEMS resonator array structure and method of operating and using same | Markus Lutz, Aaron Partridge | 2012-12-04 |
| 8222974 | MEMS resonator structure including regions with different densities and method | Markus Lutz, Aaron Partridge | 2012-07-17 |
| 7907035 | MEMS resonator array structure and method of operating and using same | Markus Lutz, Aaron Partridge | 2011-03-15 |
| 7777596 | MEMS resonator structure and method | Markus Lutz, Aaron Partridge | 2010-08-17 |
| 7757555 | Tri-axis accelerometer having a single proof mass and fully differential output signals | Christoph Lang, Gary Yama, Matthias Metz, Markus Ulm | 2010-07-20 |
| 7671515 | Microelectromechanical devices and fabrication methods | Matthias Metz, Brian Stark, Markus Ulm, Gary Yama | 2010-03-02 |
| 7595708 | MEMS resonator array structure | Markus Lutz, Aaron Partridge | 2009-09-29 |
| 7401517 | Dual-axis yaw rate sensing unit having a tuning fork gyroscope arrangement | Christoph Lang, Gary Yama | 2008-07-22 |
| 7342703 | Micro-mechanical beam protective support structures wherein at least two adjacent support structures touch each other upon reaching a predetermined bending action | Andreas Niendorf, Wilhelm Frey | 2008-03-11 |
| 7323952 | Breath-mode ring resonator structure, and method of designing, operating and using same | Aaron Partridge, Markus Lutz | 2008-01-29 |
| 7319372 | In-plane mechanically coupled microelectromechanical tuning fork resonators | Rob Norris Candler, Markus Lutz, Aaron Partridge, Volker Materna, Gary Yama +1 more | 2008-01-15 |
| 7227432 | MEMS resonator array structure and method of operating and using same | Markus Lutz, Aaron Partridge | 2007-06-05 |
| 7177068 | Apparatus, method and system for providing enhanced mechanical protection for thin beams | Andreas Niendorf, Wilhelm Frey | 2007-02-13 |
| 7026184 | Method of fabricating microstructures and devices made therefrom | Huikai Xie, Gary K. Fedder, Wilhelm Frey | 2006-04-11 |
| 6901800 | Differential in-plane tunneling current sensor | Andreas Niendorf, Wilhelm Frey | 2005-06-07 |
| 6895818 | Differential in-plane tunneling current sensor | Andreas Niendorf, Wilhelm Frey | 2005-05-24 |
| 6856067 | Device and method for electrostatically levitating a disk and method for using an electrostatic levitated disk as a sensor | Wilhelm Frey, Andreas Niendorf | 2005-02-15 |