Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8207500 | Micromechanical sensor having a variable capacitor and method for detecting electromagnetic radiation using same | Sebastian Guenther, Nicolaus Ulbrich | 2012-06-26 |
| 7319372 | In-plane mechanically coupled microelectromechanical tuning fork resonators | Zhiyu Pan, Rob Norris Candler, Markus Lutz, Aaron Partridge, Gary Yama +1 more | 2008-01-15 |