Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12153063 | Micromechanical inertial sensor | Klaus Petzold, Reinhold Wolpert, Zoltan Szkupien | 2024-11-26 |
| 11858805 | Micromechanical structure and micromechanical sensor | Stefan Kiesel, Cristian Nagel | 2024-01-02 |
| 10656173 | Micromechanical structure for an acceleration sensor | Johannes Classen, Antoine Puygranier, Denis Gugel, Guenther-Nino-Carlo Ullrich, Markus Linck-Lescanne +1 more | 2020-05-19 |
| 10598686 | Micromechanical z-acceleration sensor | Antoine Puygranier, Denis Gugel, Guenther-Nino-Carlo Ullrich, Markus Linck-Lescanne, Timm Hoehr | 2020-03-24 |
| 10273146 | Micromechanical component | Tobias Sebastian Frey | 2019-04-30 |
| 10035698 | Getter device for a micromechanical component | Nicole Schittenhelm, Carsten Geckeler | 2018-07-31 |
| 8956544 | Method for manufacturing a micromechanical structure, and micromechanical structure | Johannes Classen, Jochen Reinmuth, Pia Bustian-Todorov | 2015-02-17 |
| 8746066 | Acceleration sensor having a damping device | Johannes Classen, Harald Steffes | 2014-06-10 |
| 8584523 | Sensor device and method for manufacturing a sensor device | Rolf Kaack | 2013-11-19 |
| 8207500 | Micromechanical sensor having a variable capacitor and method for detecting electromagnetic radiation using same | Nicolaus Ulbrich, Volker Materna | 2012-06-26 |