Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10900996 | Micromechanical sensor and method for manufacturing a micromechanical sensor | Denis Gugel, Guenther-Nino-Carlo Ullrich, Johannes Classen, Markus Linck-Lescanne | 2021-01-26 |
| 10656173 | Micromechanical structure for an acceleration sensor | Johannes Classen, Denis Gugel, Guenther-Nino-Carlo Ullrich, Markus Linck-Lescanne, Sebastian Guenther +1 more | 2020-05-19 |
| 10598686 | Micromechanical z-acceleration sensor | Denis Gugel, Guenther-Nino-Carlo Ullrich, Markus Linck-Lescanne, Sebastian Guenther, Timm Hoehr | 2020-03-24 |
| 10017376 | MEMS element including a stress decoupling structure and a component including such a MEMS element | Johannes Classen, Jochen Reinmuth, Mirko Hattass, Ralf Reichenbach | 2018-07-10 |
| 9416000 | Component including two semiconductor elements, between which at least two hermetically sealed cavities are formed and method for establishing a corresponding bonding connection between two semiconductor elements | Christoph Schelling, Ralf Reichenbach, Jens Frey | 2016-08-16 |