Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9618414 | Device for determining a pressure and method for manufacturing the same | Frank Klopf, Thomas Moelkner, Marc Layer, Juergen Kober | 2017-04-11 |
| 9453292 | Method and apparatus for making a spunbond | Sebastian Sommer | 2016-09-27 |
| 8595916 | Method for producing high-pressure sensors | Frank Henning | 2013-12-03 |
| 7922849 | Process and apparatus for manufacturing spun-bonded fabric | Sebastian Sommer | 2011-04-12 |
| 7625773 | Anti-stiction technique for electromechanical systems and electromechanical device employing same | Markus Lutz, Aaron Partridge, Markus Ulm, Matthias Metz, Brian Stark +1 more | 2009-12-01 |
| 7611790 | Zinc/air battery with improved lifetime | Dirk Lange, Bhaskar Srinivasan | 2009-11-03 |
| 7449355 | Anti-stiction technique for electromechanical systems and electromechanical device employing same | Markus Lutz, Aaron Partridge, Markus Ulm, Matthias Metz, Brian Stark +1 more | 2008-11-11 |
| 7342703 | Micro-mechanical beam protective support structures wherein at least two adjacent support structures touch each other upon reaching a predetermined bending action | Andreas Niendorf, Zhiyu Pan | 2008-03-11 |
| 7319372 | In-plane mechanically coupled microelectromechanical tuning fork resonators | Zhiyu Pan, Rob Norris Candler, Markus Lutz, Aaron Partridge, Volker Materna +1 more | 2008-01-15 |
| 7176540 | Method for producing micromechanical structures and a micromechanical structure | Christoph Duenn | 2007-02-13 |
| 7177068 | Apparatus, method and system for providing enhanced mechanical protection for thin beams | Andreas Niendorf, Zhiyu Pan | 2007-02-13 |
| 7026184 | Method of fabricating microstructures and devices made therefrom | Huikai Xie, Gary K. Fedder, Zhiyu Pan | 2006-04-11 |
| 6960536 | Method for producing integrated microsystems | Franz Laermer, Christoph Duenn | 2005-11-01 |
| 6905615 | Method of manufacturing a micromechanical component | Frank Fischer, Udo Bischof, Lars Metzger | 2005-06-14 |
| 6901800 | Differential in-plane tunneling current sensor | Andreas Niendorf, Zhiyu Pan | 2005-06-07 |
| 6895818 | Differential in-plane tunneling current sensor | Andreas Niendorf, Zhiyu Pan | 2005-05-24 |
| 6867061 | Method for producing surface micromechanical structures, and sensor | Frank Fischer, Lars Metzger | 2005-03-15 |
| 6856067 | Device and method for electrostatically levitating a disk and method for using an electrostatic levitated disk as a sensor | Zhiyu Pan, Andreas Niendorf | 2005-02-15 |
| 6825057 | Thermal membrane sensor and method for the production thereof | Klaus Heyers | 2004-11-30 |
| 6808640 | Micromechanical part and method for its manufacture | Frank Fischer | 2004-10-26 |
| 6790699 | Method for manufacturing a semiconductor device | Heinz-Georg Vossenberg | 2004-09-14 |
| 6726815 | Electrochemical etching cell | Hans Artmann, Franz Laermer | 2004-04-27 |
| 6677249 | Method for manufacturing breakaway layers for detaching deposited layer systems | Franz Laermer, Hans Artmann | 2004-01-13 |
| 6672732 | Micromechanical oscillating device | Andreas Niendorf, Karsten Funk | 2004-01-06 |
| 6655834 | Sensor, in particular thermal sensor, and method for manufacturing a largely self-supporting membrane | Karsten Funk | 2003-12-02 |