Issued Patents All Time
Showing 1–25 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11976996 | Micromechanical component for a capacitive pressure sensor device | Thomas Friedrich, Christoph Hermes, Heribert Weber, Peter Schmollngruber, Volkmar Senz | 2024-05-07 |
| 11940345 | Micromechanical component for a capacitive pressure sensor device | Thomas Friedrich, Christoph Hermes, Heribert Weber, Peter Schmollngruber, Volkmar Senz | 2024-03-26 |
| 11933689 | MEMS capacitive sensor including improved contact separation | Heribert Weber, Christoph Hermes, Peter Schmollngruber, Thomas Friedrich, Volkmar Senz | 2024-03-19 |
| 11912563 | Micromechanical component and method for manufacturing a micromechanical component | Christoph Hermes, Heribert Weber, Jochen Reinmuth, Peter Schmollngruber, Thomas Friedrich | 2024-02-27 |
| 11851324 | Method for sealing entries in a MEMS element | Christoph Hermes, Heribert Weber, Peter Schmollngruber, Thomas Friedrich, Tobias Joachim Menold +1 more | 2023-12-26 |
| 10914937 | Pivot apparatus for a micromirror, and illumination apparatus having a pivot apparatus for a micromirror | Johannes Classen, Ralf Noltemeyer, Arnd Kaelberer, Peter Sudy | 2021-02-09 |
| 10427937 | Method for producing a multilayer MEMS component, and corresponding multilayer MEMS component | Arnd Kaelberer, Christian Zielke, Oliver Breitschaedel, Peter Borwin Staffeld | 2019-10-01 |
| 10020169 | Etching device and etching method | Arnd Kaelberer, Christian Zielke, Oliver Breitschaedel, Peter Borwin Staffeld | 2018-07-10 |
| 9932223 | Method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structure | Arnd Kaelberer, Christian Zielke, Oliver Breitschaedel, Peter Borwin Staffeld | 2018-04-03 |
| 9372341 | Comb drive including a pivotable mirror element | Jochen Reinmuth, Peter Sudy | 2016-06-21 |
| 9309111 | Micromechanical component and method for producing a micromechanical component | Jochen Reinmuth | 2016-04-12 |
| RE44995 | Method for producing a semiconductor component and a semiconductor component produced according to the method | Hubert Benzel, Heribert Weber, Frank Schaefer | 2014-07-08 |
| 8481427 | Method for manufacturing a micromechanical component, and micromechanical component | Andrea Urban, Arnim Hoechst | 2013-07-09 |
| 8299549 | Layer structure for electrical contacting of semiconductor components | Jochen Reinmuth, Peter Schmollngruber | 2012-10-30 |
| 8196474 | Pressure sensor | Jochen Reinmuth, Peter Schmollngruber | 2012-06-12 |
| 8123963 | Method for producing a semiconductor component and a semiconductor component produced according to the method | Hubert Benzel, Heribert Weber, Frank Schaefer | 2012-02-28 |
| 8076739 | Micromechanical component and method for producing a micromechanical component | Peter Schmollngruber, Thomas Wagner | 2011-12-13 |
| 7992443 | Sensor element for capacitive differential-pressure sensing | Bernhard Opitz, Christian Doering, Janpeter Wolff, Remigius Niekrawietz | 2011-08-09 |
| 7833405 | Micromechanical component and corresponding production method | Hubert Benzel, Heribert Weber, Frank Schaeffer | 2010-11-16 |
| 7709933 | Structural element having a porous region at least regionally provided with a cover layer and its use as well as method for setting the thermal conductivity of a porous region | Thorsten Pannek, Hans-Peter Trah, Franz Laermer | 2010-05-04 |
| 7679154 | Method for manufacturing a semiconductor component and a semiconductor component, in particular a diaphragm sensor | Hubert Benzel, Heribert Weber, Thorsten Pannek, Frank Schäfer | 2010-03-16 |
| 7495302 | Micromechanical component having a diaphragm | Frank Fischer, Lars Metzger, Arnim Hoechst, Julian Gonska | 2009-02-24 |
| 7479232 | Method for producing a semiconductor component and a semiconductor component produced according to the method | Hubert Benzel, Heribert Weber, Frank Schaefer | 2009-01-20 |
| 7419581 | Method for producing optically transparent regions in a silicon substrate | Hubert Benzel, Heribert Weber, Frank Schaefer | 2008-09-02 |
| 7306966 | Method for producing a semiconductor component and a semiconductor component, especially a membrane sensor | Hubert Benzel, Heribert Weber, Thorsten Pannek, Frank Schäfer | 2007-12-11 |