Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11012789 | MEMS microphone system | Christoph Hermes, Bernhard Gehl, Daniel Christoph Meisel, Andrew J. Doller, Yujie Zhang +1 more | 2021-05-18 |
| 10793430 | Method for producing thin MEMS wafers | Sebastien Loiseau, Bernhard Gehl, Eugene Moliere Tanguep Njiokep, Sandra Altmannshofer | 2020-10-06 |
| 9725300 | Capacitive MEMS-sensor element having bond pads for the electrical contacting of the measuring capacitor electrodes | Heiko Stahl, Bernhard Gehl, Rolf Scheben, Benedikt Stein | 2017-08-08 |
| 9266721 | Eutectic bonding of thin chips on a carrier substrate | Andreas Pruemm, Karl-Heinz Kraft, Thomas Mayer, Christoph Schelling | 2016-02-23 |
| 8993356 | Method for constructing an electrical circuit, and electrical circuit | Tjalf Pirk, Juergen Butz, Axel Franke, Frieder Haag, Heribert Weber +1 more | 2015-03-31 |
| 8749013 | Sensor and method for its production | Hubert Benzel, Simon Armbruster, Christoph Schelling, Ando Feyh | 2014-06-10 |
| 8698255 | Semiconductor component having a micromechanical microphone structure | Frank Reichenbach, Thomas Buck | 2014-04-15 |
| 8691611 | Method for creating a micromechanical membrane structure and MEMS component | Jochen Reinmuth, Brett Diamond | 2014-04-08 |
| 8692339 | Micromechanical component having a rear volume | Jochen Reinmuth, Michael Saettler, Stefan Weiss | 2014-04-08 |
| 8621929 | Manufacturing method for a micromechanical component and micromechanical component | Stefan Weiss | 2014-01-07 |
| 8481427 | Method for manufacturing a micromechanical component, and micromechanical component | Hans Artmann, Andrea Urban | 2013-07-09 |
| 8217476 | Micromechanical component and method for the manufacture thereof | Karl-Heinz Kraft, Simon Armbruster | 2012-07-10 |
| 8089828 | Acoustic sensor element | Frank Fischer | 2012-01-03 |
| 7495302 | Micromechanical component having a diaphragm | Frank Fischer, Hans Artmann, Lars Metzger, Julian Gonska | 2009-02-24 |
| 7435991 | Micromechanical sensor | Hans-Peter Baer | 2008-10-14 |
| 7243551 | Micromechanical component having a sealed cavity and at least two dielectric layers and corresponding method for its manufacture | Frank Fischer | 2007-07-17 |