Issued Patents All Time
Showing 25 most recent of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12383004 | Glove as well as wearable sensor device comprising a glove and an electronic module | Michael Kettner, Danijel Juric | 2025-08-12 |
| 10840107 | Method for forming a cavity and a component having a cavity | Benjamin Steuer, Stefan Pinter, Dietmar Haberer, Jochen Tomaschko | 2020-11-17 |
| 10589988 | Mechanical component and manufacturing method for a mechanical component | Wolfgang Heinzelmann, Mohamad Iyad Al Dibs, Rainer Straub, Stefan Pinter, Frederic Njikam Njimonzie +3 more | 2020-03-17 |
| 10431474 | Method for forming a cavity and a component having a cavity | Benjamin Steuer, Stefan Pinter, Dietmar Haberer, Jochen Tomaschko | 2019-10-01 |
| 9885866 | Mirror system and projection device | Rainer Straub, Kerrin Doessel, Johannes Baader, Frederic Njikam Njimonzie, Joerg Muchow +5 more | 2018-02-06 |
| 9764945 | Micromechanical component and corresponding test method for a micromechanical component | Sebastian Reiss, Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie, Johannes Baader +2 more | 2017-09-19 |
| 9725311 | Micromechanical component having hermetic through-contacting, and method for producing a micromechanical component having a hermetic through-contacting | Jochen Franz, Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie, Andreas Duell +3 more | 2017-08-08 |
| 9663351 | Method for producing a wafer equipped with transparent plates | Dietmar Haberer, Stefan Pinter, Jochen Tomaschko, Benjamin Steuer | 2017-05-30 |
| 9618740 | Micromirror and manufacturing method for at least one micromirror which is situatable or situated in a micromirror device | Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie, Johannes Baader, Stefan Pinter +2 more | 2017-04-11 |
| 9490137 | Method for structuring a layered structure from two semiconductor layers, and micromechanical component | Frank Fischer, Johannes Baader, Rainer Straub | 2016-11-08 |
| 9360664 | Micromechanical component and method for producing a micromechanical component | Helmut Grutzeck, Frank Schatz, Joerg Muchow, Frederic Njikam Njimonzie, Johannes Baader +2 more | 2016-06-07 |
| 9082831 | Component having a via | Marcus Ahles, Jochen Reinmuth, Hubert Benzel | 2015-07-14 |
| 8749013 | Sensor and method for its production | Hubert Benzel, Arnim Hoechst, Christoph Schelling, Ando Feyh | 2014-06-10 |
| 8558327 | Micromechanical component and corresponding production method | Kathrin Knese, Heribert Weber | 2013-10-15 |
| 8530261 | Method for producing a component, and sensor element | Torsten Kramer, Kathrin Knese, Hubert Benzel, Gregor Schuermann, Christoph Schelling | 2013-09-10 |
| 8519494 | Method for manufacturing a micromechanical diaphragm structure having access from the rear of the substrate | Torsten Kramer, Marcus Ahles, Armin Grundmann, Kathrin Knese, Hubert Benzel +1 more | 2013-08-27 |
| 8492850 | Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type | Gerhard Lammel, Hubert Benzel, Matthias Illing, Franz Laermer, Silvia Kronmueller +4 more | 2013-07-23 |
| 8492855 | Micromechanical capacitive pressure transducer and production method | Gerhard Lammel, Hubert Benzel, Christoph Schelling, Joerg Brasas | 2013-07-23 |
| 8470631 | Method for manufacturing capped MEMS components | Torsten Kramer, Kathrin Knese, Hubert Benzel, Karl-Heinz Kraft | 2013-06-25 |
| 8389327 | Method for manufacturing chips | Torsten Kramer, Matthias Boehringer, Stefan Pinter, Hubert Benzel, Matthias Illing +1 more | 2013-03-05 |
| 8334534 | Sensor and method for the manufacture thereof | Jochen Reinmuth, Neil Davies, Ando Feyh | 2012-12-18 |
| 8217476 | Micromechanical component and method for the manufacture thereof | Karl-Heinz Kraft, Arnim Hoechst | 2012-07-10 |
| 8148234 | Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure | Gerhard Lammel, Hubert Benzel, Matthias Illing, Franz Laermer, Silvia Kronmueller +4 more | 2012-04-03 |
| 7918136 | Micromechanical sensor element | Joerg Muchow, Hubert Benzel, Christoph Schelling | 2011-04-05 |
| 7858424 | Method for manufacturing a sensor array including a monolithically integrated circuit | Hubert Benzel | 2010-12-28 |