Issued Patents All Time
Showing 1–25 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11940618 | Micromechanical component and method for producing a micromechanical component | Alexander Eberspaecher, Frank Schatz, Janine Riedrich-Moeller, Josip Mihaljevic, Kerrin Doessel +2 more | 2024-03-26 |
| 11623860 | Interposer substrate, MEMS device and corresponding manufacturing method | Corinna Koepernik, Rainer Straub, Stefan Mark | 2023-04-11 |
| 11307404 | Micromechanical micromirror array and corresponding operating method | Helmut Grutzeck, Timo Schary, Philip Kaupmann | 2022-04-19 |
| 11124412 | Manufacturing method for a micromechanical window structure and corresponding micromechanical window structure | Rainer Straub, Stefan Pinter | 2021-09-21 |
| 11066295 | Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis | Philip Kaupmann, Stefan Pinter, Helmut Grutzeck, Jochen Franz | 2021-07-20 |
| 10989913 | Micromechanical component and method for producing a micromechanical component | Andreas Finn, Frederic Njikam Njimonzie, Helmut Grutzeck, Rainer Straub | 2021-04-27 |
| 10871646 | Micromirror device and method for operating a micromirror device | Frank Schatz, Helmut Grutzeck | 2020-12-22 |
| 10866407 | Micromechanical component and method for producing a micromechanical component | Daniel Maier, Corinna Koepernik, Helmut Grutzeck, Rainer Straub, Stefan Mark +1 more | 2020-12-15 |
| 10775610 | Micromechanical actuator device and method for tilting a micromechanical actuator device | Benjamin Steuer, Frederic Njikam Njimonzie, Rainer Straub, Stefan Pinter | 2020-09-15 |
| 10737930 | Micromechanical spring device and method for manufacturing a micromechanical spring device | Helmut Grutzeck, Frederic Njikam Njimonzie, Hendrik Specht, Massimiliano Putignano, Odd-Axel Pruetz | 2020-08-11 |
| 10696542 | Micromechanical component and method for producing a micromechanical component | Helmut Grutzeck, Johannes Baader | 2020-06-30 |
| 10690906 | Magnetic actuator | Stefan Pinter, Frank Schatz | 2020-06-23 |
| 10627617 | Micromechanical constituent and method for adjusting an adjustable element | Frank Schatz, Mirko Hattass, Stefan Pinter, Thorsten Balslink | 2020-04-21 |
| 10589988 | Mechanical component and manufacturing method for a mechanical component | Wolfgang Heinzelmann, Mohamad Iyad Al Dibs, Rainer Straub, Stefan Pinter, Frederic Njikam Njimonzie +3 more | 2020-03-17 |
| 10488650 | Micromechanical component and method for adjusting an adjustable part simultaneously about two axes of rotation inclined in relation to one another | Helmut Grutzeck, Mirko Hattass, Stefan Mark, Thorsten Balslink, Frank Schatz | 2019-11-26 |
| 10222609 | Micromirror arrangement and projection device | Rainer Straub, Stefan Pinter, Johannes Baader, Andreas Duell, Frederic Njikam Njimonzie +2 more | 2019-03-05 |
| 10175473 | Micromirror array and method for the manufacture thereof | Rainer Straub, Johannes Baader | 2019-01-08 |
| 10048487 | Micromirror | Heiko Nitsche, Frederic Njikam Njimonzie, Wolfram Schock, Helmut Grutzeck, Zoltan Lestyan | 2018-08-14 |
| 10001643 | Micromirror device and projection device | Rainer Straub, Johannes Baader, Andreas Duell, Frederic Njikam Njimonzie, Helmut Grutzeck | 2018-06-19 |
| 9979269 | Micromechanical component and method for producing a micromechanical component | Helmut Grutzeck, Frederic Njikam Njimonzie, Zoltan Lestyan, Sebastian Reiss | 2018-05-22 |
| 9885866 | Mirror system and projection device | Rainer Straub, Kerrin Doessel, Johannes Baader, Frederic Njikam Njimonzie, Frank Schatz +5 more | 2018-02-06 |
| 9791663 | Magnetically drivable micromirror | Stefan Pinter, Heribert Weber, Frank Fischer, Michael Krueger, Christoph Friese | 2017-10-17 |
| 9764945 | Micromechanical component and corresponding test method for a micromechanical component | Sebastian Reiss, Simon Armbruster, Helmut Grutzeck, Frederic Njikam Njimonzie, Johannes Baader +2 more | 2017-09-19 |
| 9739998 | Micromechanically assembly, method for manufacturing a micromechanical assembly and method for operating a micromechanical assembly | Helmut Grutzeck, Jochen Franz, Zoltan Lestyan | 2017-08-22 |
| 9725311 | Micromechanical component having hermetic through-contacting, and method for producing a micromechanical component having a hermetic through-contacting | Jochen Franz, Simon Armbruster, Helmut Grutzeck, Frederic Njikam Njimonzie, Andreas Duell +3 more | 2017-08-08 |